MEMS & Microelectronics Technology
Shanghai Chang Ai's MEMS-based sensors deliver miniaturized, high-precision measurement solutions for advanced electronics and semiconductor applications:
✔ Dew Point Analyzers – Ultra-compact design for in-situ moisture measurement
✔ Thermal Conductivity Analyzers – Chip-scale sensors for high-purity gas monitoring
Key Advantages:
• Microscopic footprint (down to 5mm×5mm)
• Low power consumption (<100mW)
• Batch fabrication for consistent performance
Ideal for semiconductor fabs, MEMS manufacturing, and portable gas detection systems.
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The combination of microcontroller and digital process-ing technology, anti-cross interference, stable and reli-able;
Good long-term stability, high reliability, high precision, long calibration cycle;
GEN-26 Series portable intelligent dew point analyzer Product FeaturesCompatible with a variety of sensor technology polymer film, alumina, QCM crystal vibration sensor, can be appl-ied to a variety of measurement range;Pressure sensor based on MEMS, can simultaneously monitor dew point and online pressure;Up to 10+dew-point check and multi-point temperature compensation provide accuracy measurements up to ±2 Ctd(see technical specifications);Built-in 96Wh large capacity lithium battery to avoid...
The new polymer film sensor technology to improve signal and stability to the extreme ensures the full range of high precision measurement;
New alumina silicon oxide and polymer thin film sensor technology；
CI-QM Series dew point transmitter Product FeaturesThe new QCM sensor technology measures humidity as low as -110°Ctd; Precision measurements up to ±3° ctd;Innovative online anti-pollution technology;Ultra-fast response speed and excellent long-term stab-ility;Multi-point temperature compensation check before leaving the factory;Through the standard RS485 interface and powerful service software, to provide comprehensive sensor sett-ings, data transmission, software upgrade and mainten-ance...
Continuous online measurement of moisture content in oil;
New polymer film sensor technology and pressure sensor based on MEMS;
CI-DM191x Dew point instrument with integrated display and alarm function Product FeaturesCompatible with a variety of sensor technology: polymer film, alumina, QCM crystal vibration sensor, can be applied to a variety of measurement range;Mems-based pressure sensor, can simultaneously monitor dew point and online pressure (absolute press-ure 1~1.7MPa);Up to 10 + dew-point check and multi-point temperat-ure compensation provide accuracy measurement up to ±2 Ctd (see technical parameter sheet);Ul...
Compatible with a variety of sensor technology: polymer film, alumina, QCM crystal vibration sensor, can be applied to a variety of measurement range;
Using laser principle, with the advantages of accurate measurement, fast response, high sensitivity, stability and reliability;
It has hydrophobic characteristics to ensure accurate measurement while filtering out other impurities to ensure optical signal transmittance;
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CHANG AI is a world-leading high-tech enterprise in gas analysis and detection, committed to providing customers with world-class gas analysis and detection products and one-stop solutions.
Contact Information
Fax: +86-21-33275656
Tel: +86-21-51692285 / +86-21 400 700 8817
E-mail: info@changai.com / ana@changai.com
Add: No.97, Qibao WanKe International Center, Lane 1333, Xinlong Road, Minhang District, Shanghai, P.R. China. 201101
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